The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Jul. 16, 2002
Applicants:
Steven M. George, Boulder, CO (US);
John D. Ferguson, Broomfield, CO (US);
Alan W. Weimar, Niwot, CO (US);
Christopher A. Wilson, Boulder, CO (US);
Inventors:
Steven M. George, Boulder, CO (US);
John D. Ferguson, Broomfield, CO (US);
Alan W. Weimar, Niwot, CO (US);
Christopher A. Wilson, Boulder, CO (US);
Assignee:
Regents of the University of Colorado, a Body Corporate, Denver, CO (US);
Primary Examiner:
Int. Cl.
CPC ...
C30B 28/00 (2006.01); C23C 16/44 (2006.01); B01J 31/06 (2006.01); B82Y 30/00 (2011.01); C08J 7/04 (2006.01); C23C 16/02 (2006.01); C23C 16/14 (2006.01); C23C 16/34 (2006.01); C23C 16/40 (2006.01); C23C 16/442 (2006.01); C23C 16/455 (2006.01); C09D 1/00 (2006.01); H01L 51/52 (2006.01);
U.S. Cl.
CPC ...
C23C 16/4417 (2013.01); B01J 31/069 (2013.01); B82Y 30/00 (2013.01); C08J 7/045 (2013.01); C09D 1/00 (2013.01); C23C 16/0272 (2013.01); C23C 16/14 (2013.01); C23C 16/34 (2013.01); C23C 16/403 (2013.01); C23C 16/442 (2013.01); C23C 16/45525 (2013.01); C23C 16/45555 (2013.01); B01J 2231/12 (2013.01); B01J 2231/70 (2013.01); H01L 51/5237 (2013.01);
Abstract
Inorganic materials are deposited onto organic polymers using ALD methods. Ultrathin, conformal coatings of the inorganic materials can be made in this manner. The coated organic polymers can be used as barrier materials, as nanocomposites, as catalyst supports, in semiconductor applications, in coating applications as well as in other applications.