The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Nov. 01, 2007
Applicants:
Juergen Ramm, Maienfeld, CH;
Beno Widrig, Bad Ragaz, CH;
Denis Kurapov, Walenstadt, CH;
Inventors:
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON, Pfaffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/32 (2006.01); C23C 14/54 (2006.01); C23C 14/35 (2006.01); C23C 14/22 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/54 (2013.01); C23C 14/0036 (2013.01); C23C 14/228 (2013.01); C23C 14/35 (2013.01); C23C 14/351 (2013.01); H01J 37/32009 (2013.01); H01J 37/32055 (2013.01); H01J 37/32477 (2013.01); H01J 37/32541 (2013.01);
Abstract
When treating workpiece or substrate surfaces with the help of a vacuum plasma discharge between an anode and an cathode and whereby due to such treatment a solid is formed and deposited on the anode surface, which solid has a higher specific DC impedance than the specific DC impedance of the anode material, at least parts of the anode surface are shielded from such deposition by establishing thereat a shielding plasma.