The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 28, 2016
Filed:
Nov. 21, 2012
Canon Kabushiki Kaisha, Tokyo, JP;
Naoki Miyata, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An imprint apparatus forms a pattern of an imprint material on a substrate with a mold. A holding unit holds the mold by attracting a first surface that is opposite to a second surface on which the pattern is formed, of the mold, with a suction unit. A suction force adjusting unit adjusts a suction force. A shape correcting unit applies a force to a lateral surface of the mold, such that a shape of a pattern region of the mold gets closer to a shape of a substrate-side pattern region of the substrate. The first mold surface includes first and second regions, the second region being closer to a center of the mold from the lateral surface than the first region. The suction force adjusting unit adjusts the suction force so that a suction force of the first region is lower than that of the second region.