The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
Nov. 25, 2013
Applicant:
Taiyo Yuden Co., Ltd., Tokyo, JP;
Inventor:
Yosuke Onda, Tokyo, JP;
Assignee:
TAIYO YUDEN CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H03H 9/17 (2006.01); H03H 9/02 (2006.01); H01L 41/316 (2013.01);
U.S. Cl.
CPC ...
H03H 9/173 (2013.01); H03H 9/02015 (2013.01); H03H 9/174 (2013.01); H03H 9/175 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01);
Abstract
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film that is located on the substrate and includes a first film made of an aluminum nitride film containing an additive element and second films located on an upper surface and a lower surface of the first film and made of an aluminum nitride film containing the additive element at a concentration lower than that of the first film; and a lower electrode and an upper electrode that are located to sandwich the piezoelectric film.