The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2016

Filed:

Jul. 29, 2014
Applicant:

Commissariat À L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Sami Oukassi, Saint-Eève, FR;

Arnaud Bazin, Fontaine, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01M 10/04 (2006.01); H01M 4/38 (2006.01); H01M 4/04 (2006.01); H01M 4/1395 (2010.01); H01M 6/04 (2006.01); H01M 6/18 (2006.01); H01M 6/40 (2006.01); H01M 10/052 (2010.01); H01M 10/0562 (2010.01); H01M 10/0585 (2010.01); H01M 10/38 (2006.01); B81C 1/00 (2006.01); G03F 7/09 (2006.01); C09K 13/04 (2006.01); C23F 1/02 (2006.01); C23F 4/00 (2006.01);
U.S. Cl.
CPC ...
H01M 10/04 (2013.01); H01M 4/0407 (2013.01); H01M 4/0492 (2013.01); H01M 4/1395 (2013.01); H01M 4/382 (2013.01); H01M 6/045 (2013.01); H01M 6/186 (2013.01); H01M 6/187 (2013.01); H01M 6/40 (2013.01); H01M 10/052 (2013.01); H01M 10/0562 (2013.01); H01M 10/0585 (2013.01); H01M 10/38 (2013.01); B81C 1/00396 (2013.01); B81C 1/00412 (2013.01); C09K 13/04 (2013.01); C23F 1/02 (2013.01); C23F 4/00 (2013.01); G03F 7/094 (2013.01); H01M 4/045 (2013.01); H01M 4/0421 (2013.01); H01M 4/0426 (2013.01); H01M 2300/0002 (2013.01); Y02E 60/122 (2013.01);
Abstract

The method for fabricating a lithium microbattery is performed from a stack of layers successively including: a first layer made from a first material, a second layer made from a second material, a solid electrolyte layer and a first electrode. The method further includes etching to form a first pattern made from the first material and a second pattern made from the second material, the second pattern defining a covered area and an uncovered area of the electrolyte layer. The uncovered area is then etched using the second pattern as etching mask. After etching of the first pattern, a lithium-based layer is formed on the second pattern, the lithium-based layer and the second pattern forming a second lithium-based electrode.


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