Non-planar capacitors with finely tuned capacitance values and methods of forming the non-planar capacitors

Abstract

Disclosed are non-planar capacitors with finely tuned capacitances and methods of forming them. The capacitors each incorporate one or more semiconductor bodies and one or more gate stacks traversing the one or more semiconductor bodies. At least one first semiconductor body is etched so that it is shorter in length than the others, which are incorporated into other non-planar devices and/or into the same non-planar capacitor. Additionally, at least one gate stack can be formed so that it traverses a first portion and, particularly, an end portion of the shortened semiconductor body and further so that it extends laterally some distance beyond that first portion. In such capacitors, the length of the first portion of the shorted semiconductor body, which corresponds to a capacitor conductor and which is traversed by the gate stack, which corresponds to a capacitor dielectric and another capacitor conductor, is predetermined to achieve a desired capacitance.