The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2016

Filed:

Aug. 25, 2014
Applicants:

Yokogawa Electric Corporation, Musashino-shi, Tokyo, JP;

Waseda University, Shinjuku-ku, Tokyo, JP;

Inventors:

Yukihiro Shintani, Musashino, JP;

Toshiyuki Saruya, Musashino, JP;

Hiroshi Kawarada, Shinjuku-ku, JP;

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/15 (2006.01); H01L 21/04 (2006.01); C23C 16/27 (2006.01); C23C 16/56 (2006.01); G01N 27/414 (2006.01); H01L 21/3065 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/042 (2013.01); C23C 16/27 (2013.01); C23C 16/56 (2013.01); G01N 27/4145 (2013.01); H01L 21/3065 (2013.01); H01L 29/66045 (2013.01);
Abstract

A method for treating a surface of a diamond thin film according to one aspect of the present invention performs one of a first substitution process for substituting part of hydrogen-terminals of a diamond thin film with fluorine-terminals in the absence of a fluorocarbon deposition on the surface of diamond thin film and a second substitution process for substituting part of hydrogen-terminals of a diamond thin film with fluorine-terminals in the presence of the fluorocarbon deposition on the surface of diamond thin film based on required surface properties of the diamond thin film.


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