The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2016

Filed:

Sep. 10, 2012
Applicants:

Satoshi Kojima, Yokohama, JP;

Kazunari Ooyama, Numazu, JP;

Yukihiro Abe, Mishima, JP;

Inventors:

Satoshi Kojima, Yokohama, JP;

Kazunari Ooyama, Numazu, JP;

Yukihiro Abe, Mishima, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03G 5/082 (2006.01); G03G 5/043 (2006.01); C23C 16/24 (2006.01); C23C 16/32 (2006.01); C23C 16/515 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
G03G 5/0433 (2013.01); C23C 16/24 (2013.01); C23C 16/325 (2013.01); C23C 16/515 (2013.01); G03G 5/08214 (2013.01); G03G 5/08278 (2013.01); H01J 37/32018 (2013.01); H01J 37/32036 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01); H01J 37/32715 (2013.01);
Abstract

A method for manufacturing an electrophotographic photosensitive member using plasma CVD includes steps of placing a cylindrical base member in a reactor which can be evacuated, the reactor having an electrode therein, so as to be spaced apart from the electrode, introducing a raw material gas for deposited film formation into the reactor, and applying an alternating voltage of a rectangular wave having a frequency in the range of 3 kHz to 300 kHz between the electrode and the cylindrical base member so that a potential at one of the electrode and the cylindrical base member with respect to a potential at the other becomes alternately positive and negative, to decompose the raw material gas, and forming a deposited film on the cylindrical base member. The magnitude of the potential difference between the electrode and the cylindrical base member is selectively controlled.


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