The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 21, 2016

Filed:

Aug. 29, 2013
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Nozomu Hirokubo, Fujimi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 21/25 (2006.01); G02B 5/28 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
G02B 5/28 (2013.01); G02B 5/284 (2013.01); G02B 26/001 (2013.01); Y10T 156/10 (2015.01); Y10T 156/1052 (2015.01);
Abstract

A variable wavelength interference filter includes a first substrate having a stationary mirror, a second substrate bonded to the first substrate and provided with a movable section and a movable mirror fixed to the movable section, and a third substrate bonded to the second substrate on an opposite side to the first substrate, and is provided with a first inner space sandwiched by the first substrate and the second substrate, a first gap, through which the first inner space communicates with the outside, a second inner space sandwiched by the second substrate and the third substrate, and a second gap, through which the second inner space communicates with the outside, and the first gap and the second gap are each sealed by a sealing member.


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