The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
Oct. 07, 2013
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Assignee:
AMS INTERNATIONAL AG, Rapperswil-Jona, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/18 (2006.01); G01N 27/12 (2006.01); G01N 27/22 (2006.01); G01N 25/56 (2006.01); G01N 33/00 (2006.01);
U.S. Cl.
CPC ...
G01N 27/18 (2013.01); G01N 27/223 (2013.01); G01N 25/56 (2013.01); G01N 33/0032 (2013.01);
Abstract
An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate. The integrated circuit also includes a relative humidity sensor on the substrate. The relative humidity sensor includes a first sensor electrode, a second sensor electrode, and a humidity sensitive layer covering the first and second electrodes. The integrated circuit further includes a thermal conductivity based gas sensor on the substrate. The thermal conductivity based gas sensor has an electrically resistive sensor element located above the humidity sensitive layer.