The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 21, 2016
Filed:
Dec. 15, 2014
Applicant:
Fujibo Holdings, Inc., Tokyo, JP;
Inventors:
Kouki Itoyama, Kanagawa, JP;
Motofumi Suzuki, Chiba, JP;
Assignee:
FUJIBO HOLDINGS, INC., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/20 (2012.01); B24B 37/14 (2012.01); H01L 21/304 (2006.01); B24B 37/24 (2012.01); H01L 21/02 (2006.01); H01L 29/16 (2006.01);
U.S. Cl.
CPC ...
B24B 37/14 (2013.01); B24B 37/24 (2013.01); H01L 21/02013 (2013.01); H01L 21/304 (2013.01); H01L 29/1608 (2013.01);
Abstract
The present invention provides a lapping plate, which provides a high lapping rate and also can suppress the generation of scratches on a surface of a polishing workpiece. The present invention provides a resin lapping plate comprising a resin sheet comprising a thermosetting polyurethane resin and having an opening rate of 10 to 50% and a Young's modulus of 7.0×10to 5.0×10N/m.