The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Jul. 28, 2014
Applicants:
Akustica, Inc., Pittsburgh, PA (US);
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Thomas Buck, Tamm, DE;
John Zinn, Canonsburg, PA (US);
Andy Doller, Sharpsburg, PA (US);
Brett Diamond, Pittsburgh, PA (US);
Bernhard Gehl, Wannweil, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); H01L 23/58 (2006.01); H01L 27/088 (2006.01); H01L 23/48 (2006.01); H04R 7/06 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01); H04R 7/20 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
H04R 7/06 (2013.01); H04R 7/20 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 31/003 (2013.01); H04R 2201/003 (2013.01); H04R 2207/021 (2013.01);
Abstract
A micro electrical mechanical system (MEMS) device in one embodiment includes a substrate defining a back cavity, a membrane above the back cavity, a back plate above the membrane, and a first overtravel stop (OTS) positioned at least partially directly beneath the membrane and supported by the back plate.