The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Aug. 26, 2013
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventors:
Fabian Purkl, Gerlingen, DE;
Gary Yama, Mountain View, CA (US);
Ando Feyh, Palo Alto, CA (US);
Gary O'Brien, Palo Alto, CA (US);
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/058 (2006.01); H01L 31/0232 (2014.01); G01J 5/04 (2006.01); G01J 5/02 (2006.01); G01J 5/06 (2006.01); G01J 5/20 (2006.01); G01J 5/08 (2006.01); H01L 31/09 (2006.01);
U.S. Cl.
CPC ...
H01L 31/0232 (2013.01); G01J 5/023 (2013.01); G01J 5/024 (2013.01); G01J 5/0225 (2013.01); G01J 5/045 (2013.01); G01J 5/046 (2013.01); G01J 5/06 (2013.01); G01J 5/0809 (2013.01); G01J 5/0853 (2013.01); G01J 5/20 (2013.01); H01L 31/09 (2013.01);
Abstract
In one embodiment, a MEMS sensor includes a mirror and an absorber spaced apart from the mirror, the absorber including a plurality of spaced apart conductive legs defining a tortuous path across an area directly above the mirror.