The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Nov. 27, 2013
Applicant:
Denso Corporation, Kariya, Aichi-pref., JP;
Inventor:
Takeshi Miyajima, Anjo, JP;
Assignee:
DENSO COPORATION, Kariya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/94 (2006.01); H01L 31/062 (2012.01); H01L 31/113 (2006.01); H01L 31/119 (2006.01); H01L 29/06 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 29/08 (2006.01); H01L 29/10 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0684 (2013.01); H01L 21/0262 (2013.01); H01L 21/02365 (2013.01); H01L 21/02658 (2013.01); H01L 29/0634 (2013.01); H01L 29/1033 (2013.01); H01L 29/66712 (2013.01); H01L 29/7802 (2013.01); H01L 29/7813 (2013.01); H01L 29/7816 (2013.01); H01L 29/7827 (2013.01); H01L 29/0878 (2013.01); H01L 29/1095 (2013.01);
Abstract
A semiconductor device having a super junction structure includes: multiple first columns extending in a current flowing direction; and multiple second columns extending in the current flowing direction. The first and second columns are alternately arranged in an alternating direction. Each first column provides a drift layer. The first and second columns have a boundary therebetween, from which a depletion layer expands in case of an off-state. At least one of the first columns and the second columns have an impurity dose, which is inhomogeneous by location with respect to the alternating direction.