Imaging systems with flip chip ball grid arrays

Abstract

An imaging system may include an integrated circuit package that includes an image sensor die mounted in a flip chip configuration to a package substrate. The image sensor die may be a backside illumination sensor die. The image sensor die may include an imaging device structure formed over a carrier layer. Through-silicon vias formed in the carrier layer may couple imaging device circuitry in the imaging device structure to conductive bumps on the carrier layer that are coupled to metal interconnects. A ball grid array may be formed on a surface of the package substrate that may be coupled to the conductive bumps. A glass lid may be attached to the image sensor die using attachment structures such that an air gap is formed between the glass lid and the image sensor die. Package sealing material may be deposited between the image sensor die and the package substrate.