The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Aug. 14, 2014
Applicant:
Renesas Electronics Corporation;
Inventors:
Kenji Adachi, Hitachinaka, JP;
Yukio Maki, Kanagawa, JP;
Assignee:
Renesas Electronics Corporation, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/11 (2006.01); H01L 27/02 (2006.01); H01L 21/768 (2006.01); H01L 23/485 (2006.01); H01L 23/522 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1108 (2013.01); H01L 21/76897 (2013.01); H01L 23/485 (2013.01); H01L 27/0207 (2013.01); H01L 23/5226 (2013.01); H01L 2924/0002 (2013.01);
Abstract
Variations in the contact area between contact plugs are suppressed to suppress fluctuations in contact resistance. In three third interlayer insulating films, a contact hole is self-alignedly formed to extend through the portions thereof interposed between two wiring portions and the portions thereof interposed between two gate wiring portions and reach a first polysilicon plug. In the contact hole, a second polysilicon plug is formed to come in contact with the first polysilicon plug.