The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Sep. 11, 2014
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); H01L 31/00 (2006.01); H01L 21/66 (2006.01); G01B 11/25 (2006.01);
U.S. Cl.
CPC ...
H01L 22/12 (2013.01); G01B 11/25 (2013.01);
Abstract
According to one embodiment, a pattern formed through light exposure is observed under two or more different optical conditions, and a focus shift and exposure amount in the light exposure are estimated based on a brightness value of the pattern under each of the optical conditions.