The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Dec. 15, 2011
Applicant:
Hirohiko Goto, Akashi, JP;
Inventor:
Hirohiko Goto, Akashi, JP;
Assignee:
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/677 (2013.01); B25J 15/0014 (2013.01); H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/67769 (2013.01); H01L 21/67781 (2013.01);
Abstract
A transfer robot is equipped with a first hand and a second hand. The first and the second hands, each have two blades, for holding respective substrates. In addition, the transfer robot includes a rotation unit, a first extension and retraction unit, a second extension and retraction unit and an up-down unit, and by these four units, the first and the second hands can be moved to a substrate transfer relay device where substrates are placed, and to four process chambers.