The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 14, 2016

Filed:

Apr. 22, 2014
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Jeonghoon Oh, San Jose, CA (US);

Steven M. Zuniga, Soquel, CA (US);

Andrew J. Nagengast, Sunnyvale, CA (US);

Samuel Chu-Chiang Hsu, Palo Alto, CA (US);

Gautam Shashank Dandavate, Sunnyvale, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/465 (2006.01); H01L 21/306 (2006.01); B24B 1/00 (2006.01); B24B 41/06 (2012.01); H01L 21/321 (2006.01); B24B 37/04 (2012.01); B24B 37/32 (2012.01);
U.S. Cl.
CPC ...
H01L 21/3212 (2013.01); B24B 37/04 (2013.01); B24B 41/06 (2013.01); B24B 37/32 (2013.01);
Abstract

A retaining ring comprises a generally annular body. The body comprises a top surface, a bottom surface, an outer surface connected to the top surface at an outer top perimeter and the bottom surface at an outer bottom perimeter, and an inner surface connected to the top surface at an inner top perimeter and the bottom surface at an inner bottom perimeter. The inner surface comprises seven or more planar facets. Adjacent planar facets are connected at corners. The inner bottom perimeter comprises straight edges of the planar facets connected at the corners.


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