The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Feb. 02, 2015
Applicant:
Thermo Finnigan Llc, San Jose, CA (US);
Inventors:
Scott T. Quarmby, Round Rock, TX (US);
Berg A. Tehlirian, Daly City, CA (US);
Assignee:
Thermo Finnigan LLC, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/24 (2006.01); H01J 49/04 (2006.01); F04D 19/04 (2006.01);
U.S. Cl.
CPC ...
H01J 49/24 (2013.01); F04D 19/046 (2013.01); H01J 49/0422 (2013.01); H01J 49/0481 (2013.01); F04D 19/042 (2013.01);
Abstract
A mass spectrometer system can include a vacuum manifold and a high vacuum pump. The vacuum manifold can include a foreline chamber and a high vacuum chamber. The foreline chamber can have a source inlet, a foreline inlet, and a foreline outlet. The high vacuum pump can have a vacuum port coupled to high vacuum chamber, and a foreline port coupled to the foreline inlet.