The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Jan. 26, 2012
Markus Graf, Zurich, CH;
Matthias Streiff, Zurich, CH;
Werner Hunziker, Stafa, CH;
Christoph Schanz, Stafa, CH;
Markus Graf, Zurich, CH;
Matthias Streiff, Zurich, CH;
Werner Hunziker, Stafa, CH;
Christoph Schanz, Stafa, CH;
Sensirion AG, Stafa, CH;
Abstract
In a method for manufacturing a sensor chip a spacer () is arranged at the front side () of a substrate () at which front side () a sensing element () is arranged, too. Holes () are etched for building vias () extending through the substrate () between the front side () of the substrate () and its back side (). After etching, the holes () are filled with conductive material to complete the vias (). The spacer () provides protection to the sensing element () and the sensing chip throughout the manufacturing process.