The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2016
Filed:
Jan. 23, 2013
Applicants:
Stefan Stegmeier, Munich, DE;
Jorg Zapf, Munich, DE;
Xuanming LU, Issaquah, WA (US);
Inventors:
Assignee:
Siemens Medical Solutions USA, Inc., Malvern, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); B06B 1/06 (2006.01); H01L 27/20 (2006.01); H01L 41/33 (2013.01); H01L 41/338 (2013.01);
U.S. Cl.
CPC ...
B06B 1/0629 (2013.01); H01L 27/20 (2013.01); H01L 41/33 (2013.01); H01L 41/338 (2013.01);
Abstract
An ultrasound transducer array is formed with stealth dicing. A laser is used to form defects within the piezoelectric substrate and along the desired kerf locations. The substrate is fractured along the defects. A controlled expansion, such as using thermal expansion, may be used to establish the desired kerf width. Spacers may be used to maintain the desired kerf width. The kerfs are filled to create the ultrasound transducer array.