The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2016

Filed:

Aug. 03, 2010
Applicants:

Seung-hyun Moon, Seongnam-si, KR;

Hun-ju Lee, Seongnam-si, KR;

Sang-im Yoo, Seoul, KR;

Hong-soo Ha, Changwon-si, KR;

Inventors:

Seung-Hyun Moon, Seongnam-si, KR;

Hun-Ju Lee, Seongnam-si, KR;

Sang-Im Yoo, Seoul, KR;

Hong-Soo Ha, Changwon-si, KR;

Assignee:

SUNAM CO., LTD., Anseong-si, Gyeonggi-do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 39/24 (2006.01); C04B 35/45 (2006.01); C04B 35/622 (2006.01); C23C 14/56 (2006.01); C23C 14/58 (2006.01); H01L 39/14 (2006.01);
U.S. Cl.
CPC ...
H01L 39/2451 (2013.01); C04B 35/4508 (2013.01); C04B 35/62231 (2013.01); C23C 14/562 (2013.01); C23C 14/5806 (2013.01); C23C 14/5853 (2013.01); H01L 39/143 (2013.01); C04B 2235/3215 (2013.01); C04B 2235/3224 (2013.01); C04B 2235/3281 (2013.01); C04B 2235/6584 (2013.01);
Abstract

Provided is a method of forming a ceramic wire. In the method, a ceramic precursor film is deposited on a wire substrate. Then, the wire substrate on which the ceramic precursor film is deposited is treated by heating. For treating the wire substrate by heating, a temperature of the wire substrate and/or an oxygen partial pressure of the wire substrate are controlled such that the ceramic precursor film is in a liquid state and an epitaxy ceramic film is formed from the liquid ceramic precursor film on the wire substrate.


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