The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Oct. 03, 2014
Freescale Semiconductor, Inc., Austin, TX (US);
Michael Naumann, Chandler, AZ (US);
Freescale Semiconductor, Inc., Austin, TX (US);
Abstract
A microelectromechanical systems (MEMS) device, such as a three-axis MEMS device can sense acceleration in three orthogonal axes. The MEMS device includes a single proof mass and suspension spring systems that movably couple the proof mass to a substrate. The suspension spring systems include translatory spring elements and torsion spring elements. The translatory spring elements enable translatory motion of the proof mass relative to the substrate in two orthogonal directions that are parallel to the plane of the MEMS device in order to sense forces in the two orthogonal directions. The torsion spring elements enable rotation of the proof mass about a rotational axis in order to sense force in a third direction that is orthogonal to the other two directions. The translatory spring elements have asymmetric stiffness configured to compensate for an asymmetric mass of the movable element used to sense in the third direction.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile