The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Feb. 12, 2013
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
Kenji Nakahira, Tokyo, JP;
Toshifumi Honda, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An object of the present invention is to provide an optical inspection apparatus that suppresses an influence of quantum noise and obtains superior defect detection performance even when an amount of light is small and a method thereof. In order to resolve the above problem, the present invention provides an optical inspection apparatus that includes a light source which radiates light to a sample; a light interference device which causes target light transmitted, scattered, or reflected from the sample and reference light to interfere with each other, such that strength of light after the interference becomes lower than strength of the target light; a photon counter which measures a photon number of the light after the interference by the light interference device; and a defect identifier which identifies the presence or absence of a defect, on the basis of a detected photon number obtained by the photon counter.