The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Jun. 20, 2015
Applicant:
J.a. Woollam Co., Inc, Lincoln, NE (US);
Inventors:
Galen L. Pfeiffer, Roca, NE (US);
Martin M. Liphardt, Lincoln, NE (US);
Assignee:
J.A. WOOLLAM CO., INC, Lincoln, NE (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01J 4/04 (2006.01);
U.S. Cl.
CPC ...
G01J 4/04 (2013.01);
Abstract
A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.