The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 07, 2016

Filed:

Aug. 14, 2014
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Corey Patrick Fucetola, Somerville, MA (US);

Henry Ignatius Smith, Sudbury, MA (US);

Jay J. Fucetola, Cambridge, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 65/52 (2006.01); B32B 37/06 (2006.01); B32B 38/10 (2006.01); B82Y 10/00 (2011.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B82Y 10/00 (2013.01); H01L 21/6835 (2013.01); B32B 2457/00 (2013.01); B32B 2551/00 (2013.01); H01L 2221/68327 (2013.01); H01L 2221/68368 (2013.01); H01L 2221/68381 (2013.01);
Abstract

A system and method for creating three-dimensional nanostructures is disclosed. The system includes a substrate bonded to a carrier using a bonding agent. The bonding agent may be vaporizable or sublimable. The carrier may be a glass or glass-like substance. In some embodiments, the carrier may be permeable having one or a plurality of pores through which the bonding agent may escape when converted to a gaseous state with heat, pressure, light or other methods. A substrate is bonded to the carrier using the bonding agent. The substrate is then processed to form a membrane. This processing may include grinding, polishing, etching, patterning, or other steps. The processed membrane is then aligned and affixed to a receiving substrate, or a previously deposited membrane. Once properly attached, the bonding agent is then heated, depressurized or otherwise caused to sublime or vaporize, thereby releasing the processed membrane from the carrier.


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