The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 07, 2016
Filed:
Nov. 17, 2014
Invensense, Inc., San Jose, CA (US);
Sushil Bharatan, Burlington, MA (US);
INVENSENSE, INC., San Jose, CA (US);
Abstract
A micro electro-mechanical system (MEMS) microphone is provided. The MEMS microphone is configured to operate at a predetermined range of frequencies. The MEMS microphone has a tensioned membrane preset at a tension amount selected to cause the MEMS microphone to operate at a predetermined sensitivity level that is above a threshold sensitivity level. The tension amount is controlled based on a temperature applied to the tensioned membrane during a fabrication process. At least a portion of the tensioned membrane is sandwiched between a first conductive layer and a second conductive layer configured to equalize stress of the tensioned membrane.