The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9358587 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 07, 2016

Filed:

Mar. 05, 2013
Applicant:

Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;

Inventors:

Yukio Tomifuji, Kyoto, JP;

Shigeki Minami, Kyoto, JP;

Kazuo Jodai, Kyoto, JP;

Norio Yoshikawa, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 3/02 (2006.01); H05K 3/00 (2006.01);
U.S. Cl.
CPC ...
B08B 3/022 (2013.01); H05K 3/0085 (2013.01); H05K 2203/104 (2013.01); H05K 2203/1509 (2013.01); H05K 2203/1545 (2013.01); H05K 2203/1572 (2013.01);
Abstract

A substrate treating apparatus includes a loading section, a treating tank, a rinsing tank, a drying tank, an unloading section, and a pair of endless belt membersfor transporting substrates successively through the loading section, treating tank, rinsing tank, drying tankand unloading section. The substrate treating apparatus further includes a fixing mechanism for fixing a pair of side edges of each substrate parallel to a transport direction of the substrate to the endless belt members. In the loading section, a plurality of substrates are fixed, each with the pair of edges thereof parallel to the transport direction fixed at constant intervals to the pair of endless belt members. The substrates having undergone the treatment are removed from the pair of endless belt membersin the unloading section


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Tomifuji, Yukio. (2016). Substrate treating apparatus (U.S. Patent No. 9358587). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9358587

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