The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2016
Filed:
Feb. 26, 2014
Applied Optoelectronics, Inc., Sugar Land, TX (US);
Klaus Alexander Anselm, Sugar Land, TX (US);
Rajesh Bikky, Houston, TX (US);
Stephen Hu, Houston, TX (US);
Greg Pickrell, San Leon, TX (US);
Nahid Sultana, Sugar Land, TX (US);
Jae Yoon Um, Sugar Land, TX (US);
Chia Chen David Wong, Sugar Land, TX (US);
Applied Optoelectronics, Inc., Sugar Land, TX (US);
Abstract
An improved scribe etch process for semiconductor laser chip manufacturing is provided. A method to etch a scribe line on a semiconductor wafer generally includes: applying a mask layer to a surface of the wafer; photolithographically opening a window in the mask layer along the scribe line; etching a trench in the wafer using a chemical etchant that operates on the wafer through the window opening, wherein the chemical etchant selectively etches through crystal planes of the wafer to generate a V-groove profile associated with the trench; and cleaving the wafer along the etched trench associated with the scribe line through application of a force to one or more regions of the wafer.