The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Jul. 11, 2012
Applicant:

Shigeharu Kimura, Yokohama, JP;

Inventor:

Shigeharu Kimura, Yokohama, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); G02B 21/00 (2006.01); G02B 27/09 (2006.01); G01N 21/47 (2006.01); G01J 3/453 (2006.01); G01J 9/02 (2006.01); G01J 3/447 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0072 (2013.01); G01B 9/02038 (2013.01); G01J 3/447 (2013.01); G01J 3/453 (2013.01); G01J 9/02 (2013.01); G01N 21/4795 (2013.01); G02B 21/0056 (2013.01); G02B 21/0068 (2013.01); G02B 27/0988 (2013.01);
Abstract

Provided is an optical apparatus characterized in that alight from a light source is split to a first light and a second light, and the first light is focused onto an observation object, that an optical filter having a light shielding region for high resolution is disposed in at least one optical path selected from optical paths of the first light, second light and response light from the observation object, that an interference light formed by causing interference between the response light and the reference light in polarized states different from each other is split to multiple beams, and desired amplitude information signals are obtained from the multiple beams through a phase plate and a polarization plate to increase intensity of the second light, whereby the signal to noise ratio is improved.


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