The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Aug. 30, 2013
Applicant:

Industry-academic Cooperation Foundation, Yonsei University, Seodaemun-gu, Seoul, KR;

Inventors:

Hyun Jae Kim, Seoul, KR;

Kyung Ho Kim, Seoul, KR;

Gun Hee Kim, Seoul, KR;

Tae Hoon Jeong, Seoul, KR;

Hyun Soo Shin, Seoul, KR;

Won Jun Park, Seoul, KR;

Yun Jung Choi, Seoul, KR;

Ka Young Lee, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 6/00 (2006.01); C23C 18/12 (2006.01); H01L 21/02 (2006.01); C23C 18/08 (2006.01); C23C 30/00 (2006.01);
U.S. Cl.
CPC ...
C23C 6/00 (2013.01); C23C 18/08 (2013.01); C23C 18/1216 (2013.01); C23C 18/1254 (2013.01); C23C 30/00 (2013.01); H01L 21/02554 (2013.01); H01L 21/02565 (2013.01); H01L 21/02628 (2013.01);
Abstract

A method of fabricating a liquid for an oxide thin film is provided, which includes mixing at least two kinds of dispersoids selected from the group consisting of a Zinc compound, an Indium compound, a Gallium compound, a Tin compound and a Thallium compound, with dispersion media corresponding to the selected dispersoids to form a dispersion system, and stirring and aging the dispersion system at a predetermined temperature for a predetermined time, wherein a molar ratio of the Zinc compound to each of the Indium compound, Gallium compound, Tin compound and Thallium compound is 1:0.1 to 1:2. According to the present invention, the liquid for the oxide thin film may be fabricated by a sol-gel method making it capable of being implemented in mass production in a simple and low-cost manner as opposed to the conventional vacuum deposition method.


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