The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Jul. 24, 2013
Applicant:

Ltc Co., Ltd., Gyeonggi-do, KR;

Inventors:

Ho Sung Choi, Gyeonggi-do, KR;

Kwang Hyun Ryu, Gyeonggi-do, KR;

Jong Il Bae, Gyeonggi-do, KR;

Jong Soon Lee, Gyeonggi-do, KR;

Hye Sung Yang, Gyeonggi-do, KR;

Sang Ku Ha, Gyeonggi-do, KR;

Assignee:

LTC Co., Ltd., Anyang, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 3/28 (2006.01); C11D 3/30 (2006.01); C11D 3/43 (2006.01); C11D 7/32 (2006.01); C11D 11/00 (2006.01); C11D 3/20 (2006.01); C23G 1/20 (2006.01); H01L 21/02 (2006.01); C11D 7/34 (2006.01); C11D 7/50 (2006.01); C23C 22/02 (2006.01); C23C 22/63 (2006.01); C23F 11/16 (2006.01);
U.S. Cl.
CPC ...
C11D 11/0029 (2013.01); C11D 3/2003 (2013.01); C11D 3/2041 (2013.01); C11D 3/2068 (2013.01); C11D 7/3209 (2013.01); C11D 7/34 (2013.01); C11D 7/5004 (2013.01); C11D 7/5013 (2013.01); C11D 7/5022 (2013.01); C11D 11/0047 (2013.01); C23C 22/02 (2013.01); C23C 22/63 (2013.01); C23F 11/165 (2013.01); C23G 1/20 (2013.01); H01L 21/02068 (2013.01);
Abstract

The present invention proposes a method for removing an oxide formed on the surface of a copper film used in the process of manufacturing a circuit for a semiconductor, an organic light-emitting diode, an LED, or a liquid crystal display without causing corrosion on a lower metal film. The composition including corrosive amine may remove a metal oxide depending on the content of additive ranging from 0.01 to 10% regardless of the content of ultrapure water. A polar solvent other than the corrosive amine may efficiently remove an oxide from the surface of the metal when the same contains water and 0.01 to 20% of the additive.


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