The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 31, 2016

Filed:

Feb. 22, 2011
Applicants:

Joerg Palm, Munich, DE;

Stefan Jost, Munich, DE;

Martin Fuerfanger, Steinhoering, DE;

Jessica Hartwich, Sauerlach, DE;

Inventors:

Joerg Palm, Munich, DE;

Stefan Jost, Munich, DE;

Martin Fuerfanger, Steinhoering, DE;

Jessica Hartwich, Sauerlach, DE;

Assignee:

Saint-Gobain Glass France, Courbevoie, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 3/00 (2006.01); C23C 16/458 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
B23Q 3/00 (2013.01); C23C 16/4582 (2013.01); H01L 21/67109 (2013.01); H01L 21/67346 (2013.01); H01L 21/67353 (2013.01); H01L 21/67383 (2013.01); H01L 31/1876 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11); Y10T 29/49998 (2015.01);
Abstract

A device for forming a reduced chamber space, which is a process box or a process hood, containing an apparatus, which positions at least two multilayer bodies each including a surface to be processed, wherein the apparatus is designed such that the multilayer bodies are opposite to each other, wherein the surfaces to be processed are facing away from each other such that the multilayer bodies can be processed as a multilayer body arrangement in a processing system. In addition, a method for positioning the two multilayer bodies comprising a surface to be processed, with the two multilayer bodies disposed in such a device such that multilayer bodies are opposite each other, wherein the surfaces to be processed are facing away from each other, such that the multilayer bodies are processable as a multilayer body arrangement in a processing system.


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