The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Sep. 21, 2015
Electronics and Telecommunications Research Institute, Daejeon, KR;
Unitex Co., Ltd, Gyeonggi-do, KR;
Nam Sung Cho, Daejeon, KR;
Jeong Ik Lee, Gyeonggi-do, KR;
Joo Hyun Hwang, Seoul, KR;
Chul Woong Joo, Seoul, KR;
Jun-Han Han, Deajeon, KR;
Seung Koo Park, Daejeon, KR;
Jaehyun Moon, Daejeon, KR;
Doo-Hee Cho, Daejeon, KR;
Jin Wook Shin, Incheon, KR;
Hye Yong Chu, Daejeon, KR;
Seongdeok Ahn, Daejeon, KR;
Jin Woo Huh, Daejeon, KR;
Myung Gi Lee, Gyeonggi-do, KR;
Kyung Soo Suh, Daejeon, KR;
Byoung Gon Yu, Chungcheongbuk-do, KR;
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE, Daejeon, KR;
UNITEX CO., LTD, Gyeonggi-Do, KR;
Abstract
Provided is a method of fabricating an organic scattering layer. The method may include providing a deposition apparatus with a reaction chamber and a source chamber, loading a substrate in the reaction chamber, supplying carrier gas into the source chamber that may be configured to supply an evaporated organic source material into the reaction chamber, a temperature of the carrier gas ranging from 25° C. to 50° C., and spraying the carrier gas and the evaporated organic source material into the reaction chamber through a showerhead to deposit an organic scattering layer on the substrate, the organic scattering layer including organic particles, which may be provided in a molecularized form of the evaporated organic source material, and thereby having an uneven surface.