The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Apr. 16, 2013
Applicant:
Rf Micro Devices, Inc., Greensboro, NC (US);
Inventors:
Merrill Albert Hatcher, Jr., Greensboro, NC (US);
Jayanti Jaganatha Rao, Jamestown, NC (US);
John Robert Siomkos, Greensboro, NC (US);
Assignee:
RF Micro Devices, Inc., Greensboro, NC (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/25 (2006.01); H01L 41/053 (2006.01); C23C 16/40 (2006.01); C23C 16/455 (2006.01); H03H 9/02 (2006.01); H03H 3/08 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0533 (2013.01); C23C 16/403 (2013.01); C23C 16/45525 (2013.01); H03H 3/08 (2013.01); H03H 9/02929 (2013.01);
Abstract
Acoustic wave devices and methods of coating a protective film of alumina (AlO) on the acoustic wave devices are disclosed herein. The protective film is applied through an atomic layer deposition (ALD) process. The ALD process can deposit very thin layers of alumina on the surface of the acoustic wave devices in a precisely controlled manner. Thus, the uniform film does not significantly distort the operation of the acoustic wave device.