The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 24, 2016

Filed:

Aug. 05, 2015
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Satoshi Takenaka, Nagano, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); H01L 33/30 (2010.01); H01L 33/00 (2010.01); H01L 31/16 (2006.01); G01N 21/3586 (2014.01); G01J 3/28 (2006.01); H01L 31/09 (2006.01); H01L 31/105 (2006.01); G01J 5/10 (2006.01); H01L 31/0304 (2006.01); H01L 31/18 (2006.01); G01J 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 33/30 (2013.01); G01J 3/2823 (2013.01); G01J 5/10 (2013.01); G01N 21/3586 (2013.01); H01L 31/09 (2013.01); H01L 31/105 (2013.01); H01L 31/16 (2013.01); H01L 33/0004 (2013.01); G01J 2005/0077 (2013.01); G02F 2202/12 (2013.01); G02F 2203/13 (2013.01); H01L 31/03046 (2013.01); H01L 31/1844 (2013.01);
Abstract

A photoconductive antenna is adapted to generate terahertz waves when irradiated by pulsed light. The photoconductive antenna includes a semiconductor layer, a first conductive layer, a second conductive layer, a first electrode and a second electrode. The first conductive layer is disposed on a first surface of the semiconductor layer. The second conductive layer is disposed on the first surface of the semiconductor layer with a prescribed gap being formed between the first conductive layer and the second conductive layer. The first electrode is electrically connected to the first conductive layer. The second electrode is electrically connected to the second conductive layer. The first conductive layer contains a first conductive type impurity. The second conductive layer contains a second conductive type impurity. The semiconductor layer has a carrier density lower than a carrier density of the first conductive layer or a carrier density of the second conductive layer.


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