The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Oct. 30, 2014
Applicant:
Samsung Sdi Co., Ltd., Yongin-si, Gyeonggi-do, KR;
Inventors:
Youn-Hee Nam, Suwon-si, KR;
Hea-Jung Kim, Suwon-si, KR;
Sang-Kyun Kim, Suwon-si, KR;
Sung-Hwan Kim, Suwon-si, KR;
Yun-Jun Kim, Suwon-si, KR;
Joon-Young Moon, Suwon-si, KR;
Hyun-Ji Song, Suwon-si, KR;
Assignee:
SAMSUNG SDI CO., LTD., Yongin-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/11 (2006.01); H01L 21/308 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/306 (2006.01); G03F 7/40 (2006.01); G03F 7/20 (2006.01); C09D 177/10 (2006.01); C09D 179/08 (2006.01); C08G 69/32 (2006.01); C08G 73/10 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); C08G 69/32 (2013.01); C08G 73/105 (2013.01); C08G 73/1039 (2013.01); C08G 73/1046 (2013.01); C08G 73/1071 (2013.01); C09D 177/10 (2013.01); C09D 179/08 (2013.01); G03F 7/20 (2013.01); G03F 7/40 (2013.01); H01L 21/0214 (2013.01); H01L 21/0217 (2013.01); H01L 21/0276 (2013.01); H01L 21/02118 (2013.01); H01L 21/02282 (2013.01); H01L 21/3081 (2013.01); H01L 21/3086 (2013.01); H01L 21/30604 (2013.01);
Abstract
A hardmask composition includes a polymer including a moiety represented by the following Chemical Formula 1 and a solvent. In the above Chemical Formula 1, A and B are as defined in the specification.