The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Jul. 24, 2014
Applicant:
International Business Machines Corporation, Armonk, NY (US);
Inventors:
John J. Bandy, Cambridge, VT (US);
Graham M. Bates, Waterbury, VT (US);
Bradley M. Mahan, Burlington, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G01V 8/12 (2006.01);
U.S. Cl.
CPC ...
G01V 8/12 (2013.01);
Abstract
A calibration gauge, an apparatus and a method for calibrating sensors that detect wafer protrusion from a wafer cassette using the calibration gauge. The calibration gauge includes a disk having a first region which is a circular sector of central angle Ahaving a constant radius Rabout a center and an integral second region of increasing radius about the center, the increasing radius increasing from Rto Rthrough a central angle A, wherein Ris greater than Rand A+Aequals 360°.