The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Oct. 20, 2014
Olympus Corporation, Tokyo, JP;
Nobuaki Sakai, Hachioji, JP;
Yoshitsugu Uekusa, Tachikawa, JP;
OLYMPUS CORPORATION, Tokyo, JP;
Abstract
A compound microscope of an optical microscope and a scanning probe microscope includes a stage to support a sample substrate holding a sample, and a cantilever chip having a substrate, a cantilever supported by the substrate, and a probe provided at the free end of the cantilever. The compound microscope further includes a scanner to hold the cantilever chip so that the probe faces the sample substrate and so that the substrate is inclined with respect to the sample substrate and to three-dimensionally scan the cantilever chip with respect to the sample substrate, a displacement sensor to optically detect the displacement of the cantilever, and an illumination light source to apply illumination light for observation by the optical microscope to the sample through the space between the substrate and the sample substrate.