The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Jul. 18, 2014
Kulite Semiconductor Products, Inc., Leonia, NJ (US);
Adam Hurst, New York, NY (US);
Arend Van Der Zande, New York, NY (US);
James Hone, New York, NY (US);
Xulite Semiconductor Products, Inc., Leonia, NJ (US);
The Trustees of Columbia University in the City of New York, New York, NY (US);
Abstract
This disclosure provides example methods, devices, and systems for a two dimensional material-based pressure sensor. A sensor device is provided that includes a substrate having a back electrode, a conductive layer in communication with the back electrode, and an insulating layer coupled to the conductive layer. The insulating layer includes one or more cavity regions. A sensor membrane comprising a two-dimensional material is disposed adjacent to the insulating layer and covering at least one of the one or more cavity regions. A first sensing electrode is in electrical communication with a first region of the sensor membrane, and a second sensing electrode is in communication with a second region of the sensor membrane. The sensor membrane is configured to respond to pressure changes exerted on the sensor device.