The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2016
Filed:
Feb. 27, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Takuya Kinugawa, Chino, JP;
Akinori Yamada, Ina, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 3/00 (2006.01); G01P 15/097 (2006.01);
U.S. Cl.
CPC ...
B81B 3/0086 (2013.01); G01P 15/097 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); Y10T 29/49117 (2015.01);
Abstract
A MEMS vibrator includes an insulating portion, a first electrode provided on one surface of the insulating portion, a fixed portion, and a function portion, a second electrode provided so that at least a portion thereof overlaps the first electrode at a distance therefrom. The second electrode comes into contact with the function portion and extends from the fixed portion.