The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Nov. 24, 2009
Franz Felberer, Vienna, AT;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
Twan Van Lippen, Noord-Brabant, NL;
Iris Bominaar-silkens, Valkenswaard, NL;
Franz Felberer, Vienna, AT;
Remco Henricus Wilhelmus Pijnenburg, Hoogeloon, NL;
Twan van Lippen, Noord-Brabant, NL;
Iris Bominaar-Silkens, Valkenswaard, NL;
NXP B.V., Eindhoven, NL;
Abstract
A capacitive micro-electromechanical system (MEMS) microphone includes a semiconductor substrate having an opening that extends through the substrate. The microphone has a membrane that extends across the opening and a back-plate that extends across the opening. The membrane is configured to generate a signal in response to sound. The back-plate is separated from the membrane by an insulator and the back-plate exhibits a spring constant. The microphone further includes a back-chamber that encloses the opening to form a pressure chamber with the membrane, and a tuning structure configured to set a resonance frequency of the back-plate to a value that is substantially the same as a value of a resonance frequency of the membrane.