The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2016

Filed:

Dec. 29, 2014
Applicant:

Panasonic Corporation, Osaka, JP;

Inventors:

Shigeyuki Sasaki, Hyogo, JP;

Yoshiaki Kondo, Hyogo, JP;

Shigeaki Ikai, Hyogo, JP;

Assignee:

JOLED INC, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 51/56 (2006.01); G09F 9/30 (2006.01); H01L 27/32 (2006.01); C23C 14/56 (2006.01); C23C 14/58 (2006.01); H01L 51/00 (2006.01); C23C 14/12 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); C23C 14/566 (2013.01); C23C 14/584 (2013.01); G09F 9/30 (2013.01); H01L 27/3244 (2013.01); C23C 14/12 (2013.01); H01L 51/001 (2013.01); H01L 2227/323 (2013.01);
Abstract

A method of manufacturing an EL display device having a panel part is such that a constituent element of the panel part is formed through film formation in a vacuum atmosphere. After the constituent element of the panel part has been formed on a substrate in the vacuum atmosphere, the post-film-formation substrate is placed on standby during transporting the substrate from a place in the vacuum atmosphere to a place in an atmospheric-pressure atmosphere. The placing the substrate on standby includes a first intake period and a second intake period. During the first intake period, an intake gas is gradually introduced to change the atmosphere, from the first vacuum atmosphere to the second vacuum atmosphere that exhibits a lower degree of vacuum than that of the first vacuum atmosphere. During the second intake period, the intake gas is introduced to change the atmosphere, from the second vacuum atmosphere to the atmospheric-pressure atmosphere. The first period is set to be longer in time than the second period.


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