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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9343610 B1

PDFFull Text
Date of Patent:
May. 17, 2016

Filed:

Sep. 16, 2014

Device and method for precipitating a layer on a substrate

Applicant:

Saint-gobain Glass France, Courbevoie, FR;

Inventors:

Joerg Palm, Munich, DE;

Stephan Pohlner, Munich, DE;

Stefan Jost, Munich, DE;

Thomas Happ, Munich, DE;

Assignee:

SAINT-GOBAIN GLASS FRANCE, Courbevoie, FR;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

Brook Kebede

Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 31/18 (2006.01); C23C 14/06 (2006.01); C23C 14/54 (2006.01); C23C 14/56 (2006.01); C23C 16/44 (2006.01); C30B 23/00 (2006.01); C30B 29/48 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); C23C 14/0617 (2013.01); C23C 14/0623 (2013.01); C23C 14/54 (2013.01); C23C 14/564 (2013.01); C23C 16/4412 (2013.01); C30B 23/005 (2013.01); C30B 29/48 (2013.01);
Abstract

The invention relates to a device for depositing a layer made of at least two components on an object, with a deposition chamber for disposing the object, at least one source with material to be deposited, as well as at least one device for controlling the deposition process, implemented such that the concentration of at least one component of the material to be deposited can be modified in its gas phase prior to deposition on the substrate by selective binding of a specified quantity of the at least one component, wherein the selectively bound quantity of the at least one component can be controlled by modifying at least one control parameter that is actively coupled to a binding rate or the component. It further relates to a device for depositing a layer made of at least two components on an object, wherein a device for controlling the deposition process has at least one gettering element made of a reactive material, wherein the reactive material includes copper and/or molybdenum. It further relates to a method for depositing a layer made of at least two components on an object, wherein a selectively bound quantity of at least one component is controlled by modifying a binding rate of a device for controlling the deposition process.

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