The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Sep. 04, 2013
Applicant:
Tokuyama Corporation, Yamaguchi, JP;
Inventors:
Keiichiro Hironaka, Yamaguchi, JP;
Toru Kinoshita, Yamaguchi, JP;
Assignee:
Tokuyama Corporation, Yamaguchi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); C30B 29/68 (2006.01); B82Y 20/00 (2011.01); H01L 29/20 (2006.01); H01L 33/16 (2010.01); H01L 33/32 (2010.01); H01L 33/02 (2010.01); H01S 5/02 (2006.01); H01S 5/32 (2006.01); H01S 5/343 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 29/045 (2013.01); B82Y 20/00 (2013.01); C30B 25/186 (2013.01); C30B 29/403 (2013.01); C30B 29/68 (2013.01); H01L 29/2003 (2013.01); H01L 33/16 (2013.01); H01S 5/343 (2013.01); H01L 21/0254 (2013.01); H01L 21/0262 (2013.01); H01L 21/02389 (2013.01); H01L 21/02433 (2013.01); H01L 33/02 (2013.01); H01L 33/32 (2013.01); H01S 5/0206 (2013.01); H01S 5/3202 (2013.01); H01S 5/34333 (2013.01);
Abstract
A substrate includes aluminum nitride, wherein the aluminum nitride substrate has on at least a surface thereof an aluminum nitride single-crystal layer having as a principal plane a plane that is inclined 0.05° to 0.40° in the m-axis direction from the (0001) plane of a wurzite structure.