The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Apr. 23, 2015
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Yuya Matsuda, Mie, JP;
KABUSHIKI KAISHA TOSHIBA, Minato-ku, JP;
Abstract
A semiconductor device includes a substrate; a stack structure including a plurality of insulating films and a plurality of metal films disposed alternately one above another. The stack structure is provided above the substrate and has a stairway portion including a plurality of terraces located at least at one end portion thereof. A liner film and a stopper film are disposed so as to cover an upper portion the stack structure in the stairway portion formed of the terraces. A plurality of holes are connected to each of the terraces. Each of the terraces is formed of a stack of the insulating films and the metal films. Each of the holes extends through the stopper film and the liner film and connect to the metal films of the terraces.