The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Aug. 09, 2012
Yasuhiko Hashimoto, Kobe, JP;
Shigeki Ono, Kobe, JP;
Takayuki Fukushima, Takarazuka, JP;
KAWASAKI JUKOGYO KABUSHIKI KAISHA, Kobe, JP;
Abstract
An end effector device attached to a tip end portion of a robot arm includes a plurality of support units provided on a blade. Each of the support units includes: a plurality of nail pieces configured to support peripheral portions of a plurality of semiconductor wafers such that the semiconductor wafers are parallel to one another and spaced apart from one another; and a pitch changing mechanism configured to change upper-lower intervals of the nail pieces. The pitch changing mechanism includes: a coil spring configured to support the plurality of nail pieces such that the plurality of nail pieces are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism configured to cause the coil spring to elastically deform in the upper-lower direction. The operating mechanism includes a piston pin fitted in the coil spring to move up and down.