The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 17, 2016

Filed:

Oct. 28, 2011
Applicants:

Norbert Kreft, Kippenheim, DE;

Stefan Oelting, Wachsenburggemeinde, DE;

Inventors:

Norbert Kreft, Kippenheim, DE;

Stefan Oelting, Wachsenburggemeinde, DE;

Assignee:

ANTEC SOLAR GMBH, Arnstadt, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01); H01L 21/02 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02631 (2013.01); C23C 14/243 (2013.01); C23C 14/246 (2013.01); C23C 14/566 (2013.01); H01L 31/1836 (2013.01); Y02E 10/50 (2013.01);
Abstract

The invention relates to a method for the continuous coating of at least one substratewith a semiconductor material e.g. CdTe. To this end a semiconductor material is sublimated in at least one cruciblein order to deposit it on a substrate, e.g. a glass panel. If the crucibleis filled with semiconductor material () during the deposition and/or evaporation, the set-up time required otherwise is then eliminated. Preferably used for carrying out the method is a CSS reactor comprising a crucible, a guide for substrates and at least one lock through which the crucible can be refilled during evaporation of semiconductor material from the crucible.


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