The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2016
Filed:
Dec. 21, 2014
Western Digital (Fremont), Llc, Fremont, CA (US);
Ronghui Zhou, Fremont, CA (US);
Xiaoyu Yang, Union City, CA (US);
Ming Jiang, San Jose, CA (US);
Jinqiu Zhang, Fremont, CA (US);
Western Digital (Fremont), LLC, Fremont, CA (US);
Abstract
A method manufacturing a magnetic writer provides an intermediate layer including multiple sublayers is provided. The sublayers include first and second nonmagnetic layers and an etch stop layer being between the first and second nonmagnetic layers. A trench is formed in the intermediate layer using at least one etch, such as a reactive ion etch. The trench has a location and profile corresponding to the main pole. A main pole having a bottom and a top is provided in the trench. At least a portion of the second nonmagnetic layer is removed using at least a second etch, such as a wet etch process. The etch stop layer is resistant to the at least the second etch. A half side shield is provided on at least part of the first nonmagnetic layer. The half side shield bottom is between the top and the bottom of the main pole.